Self-heating enhanced charge trapping effect for InGaZnO thin film transistor

Abstract

This paper investigates the degradation mechanism under self-heating stress for InGaZnO thin film transistor. The apparent positive threshold voltage (Vt) shift and on-current degradation indicate that the combination of trap states generation and electron trapping effect occur during stress. Furthermore, the asymmetric degradation behavior in the Id-Vg saturation measurement demonstrates that the trap states location is near the source side since the relative vertical electrical field is higher than drain side. Moreover, the Joule heating generated by self-heating operation can enhance electron trapping effect and cause larger Vt shift in comparison with the gate-bias stress.