Levitation of cylindrical particles in the sheath of an rf plasma

B. M. Annaratone, A. G. Khrapak, A. V. Ivlev, Gerry Sollner, Peter Bryant, R. Sütterlin, Uwe Konopka, K. Yoshino, M. Zuzic, Hubertus M. Thomas,

Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 2001 · 67 citations · 21 references

Concepts

Abstract

Microrods were levitated in the collisional sheath of a rf plasma. Rods below a critical length settle vertically, parallel to the electric field, while longer rods float horizontally. Usually rods with other inclinations spin about a vertical axis. These experimental features fit well with a model that includes a theoretical profile for the sheath, a plasma model for the screening length, which increases going deeper in the sheath, and a plasma theory for the charging of the rod's elements. Despite the agreement this paper highlights the need for a better understanding of the charging mechanism of bodies in sheaths and of the transition region in collisional sheaths.

References

21