Concepedia

Publication | Open Access

Low temperature wafer bonding for thin silicon film transfer

DOIFull Paper Access

16

Citations

11

References

2003

Year

D. Goustouridis, K. Minoglou, S. Kolliopoulou, S. Chatzandroulis, P. Morfouli, P. Normand, D. Tsoukalas
Sensors and Actuators A Physical

References

YearCitations

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