Publication | Closed Access
Numerical study on the measurement of thin film mechanical properties by means of nanoindentation
331
Citations
23
References
2001
Year
Materials ScienceNumerical StudyEngineeringMicromechanicsMechanical PropertiesMicrofabricationMechanicsMechanical EngineeringApplied PhysicsSolid MechanicsNanometrologyThin FilmsNanomechanicsMechanics Of MaterialsThin Film Processing
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