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Stability of structural defects of polycrystalline silicon grown by rapid thermal annealing of amorphous silicon films

Materials EngineeringMaterials ScienceEngineeringApplied PhysicsPolycrystalline SiliconStructural DefectsDefect FormationSemiconductor Device FabricationAmorphous SolidSilicon On InsulatorMicrostructureSilicon DebuggingAmorphous Silicon Films