Fabrication of submicron-scale SrTiO3−δ devices by an atomic force microscope

Abstract

By applying a negative voltage to the conducting tip of an atomic force microscope, we modify on submicron-scale semiconducting oxygen deficient SrTiO3−δ thin films grown on LaAlO3 substrates. In comparison with the as-grown film, the modified regions present different electrical and structural properties, which can be exploited to realize submicrometer circuits. After a discussion on the mechanisms of the process, we report a prototype of a SrTiO3−δ-based sidegate field-effect transistor, showing a 4% modulation of channel resistivity with gate voltages up to 40 V.