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Sputter deposition of titanium monoxide and dioxide thin films with controlled properties using optical emission spectroscopy

Materials ScienceOptical MaterialsEngineeringOptical PropertiesSurface ScienceApplied PhysicsOptical Emission SpectroscopyTitanium MonoxideDioxide Thin FilmsThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing