Sensors and Actuators A Physical · 2000 · 74 citations · 7 references
EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSensorsCmos Circuit DesignElectrical SensorsMagnetic SensorsMems DesignMems SensorsMicroelectromechanical SensorsMicrofabricated SensorsMicromachined SensorsMicroscale Sensing
7
F. Primdahl · Journal of Physics E Scientific Instruments · 1979 · 496 citations
R. Gottfried-Gottfried, Wolfgang Budde, R. Mae et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 1995 · 18 citations