LPE growth on structured {100} InP substrates and their fabrication by preferential etching - Concepedia

Concepedia

Publication | Closed Access

LPE growth on structured {100} InP substrates and their fabrication by preferential etching

25

Citations

21

References

1982

Year

S.E.H. Turley, P.D. Greene

Journal of Crystal Growth

Materials ScienceEngineeringInp SubstratesBeam LithographyMicrofabricationPreferential EtchingSurface ScienceApplied PhysicsPrinted ElectronicsSemiconductor Device FabricationElectronic PackagingMolecular Beam EpitaxyMicroelectronicsPlasma EtchingLpe Growth

References

	Year	Citations

Page 1