Publication | Open Access
Motion detection of a micromechanical resonator embedded in a d.c. SQUID
182
Citations
26
References
2008
Year
Motion DetectionD.c. SquidEngineeringSoft RoboticsPhysicsMicrofabricationMicromachinesMechanical EngineeringNano Electro Mechanical SystemBiomimetic ActuatorMicromechanical ResonatorMicroactuatorInstrumentationMicrofluidicsMicro-electromechanical System
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