Drilling of microholes down to 10μm in diameter using ultrasonic grinding

Wire Electro-Discharge Grinding for Micro-Machining

T. Masuzawa, Masahisa Fujino, K. Kobayashi et al. · CIRP Annals · 1985 · 577 citations

Engineering, Manufacturing Engineering, Materials Engineering +11

Microultrasonic Machining by the Application of Workpiece Vibration

Kai Egashira, Takahisa Masuzawa · CIRP Annals · 1999 · 141 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +14

Micro-drilling of monocrystalline silicon using a cutting tool

Kai Egashira, Katsumi MIZUTANI · Precision Engineering · 2002 · 98 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Fabrication and cutting performance of cemented tungsten carbide micro-cutting tools

Kai Egashira, Shigeyuki Hosono, Sho Takemoto et al. · Precision Engineering · 2011 · 94 citations

Engineering, Manufacturing Engineering, Materials Engineering +12

Ultrasonic Vibration Drilling of Microholes in Glass

Kazuhiro Egashira, K. Mizutani, Toshiyuki NAGAO · CIRP Annals · 2002 · 89 citations

Engineering, Materials Engineering, Mechanical Engineering +9