Structural and morphological evolution of aluminum nitride thin films: Influence of additional energy to the sputtering process

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Natural Sciences, Materials Engineering, Materials Science +16

Low-temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputtering

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Natural Sciences, Materials Engineering, Materials Science +15

Structural characteristics of AlN films deposited by pulsed laser deposition and reactive magnetron sputtering: A comparative study

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Natural Sciences, Materials Engineering, Materials Science +17

Preparation of c-Axis Oriented AlN Thin Films by Low-Temperature Reactive Sputtering

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Natural Sciences, Materials Engineering, Materials Science +15

AlN films deposited under various nitrogen concentrations by RF reactive sputtering

Hao Cheng, Y. Sun, J. X. Zhang et al. · Journal of Crystal Growth · 2003 · 121 citations

Natural Sciences, Materials Engineering, Materials Science +16