Introducing densification mechanisms into the modelling of HfO2 atomic layer deposition

Cédric Mastail, Cloé Lanthony, Stéphane Olivier, Jean‐Marie Ducéré, G. Landa, A. Estève, M. Djafari Rouhani, N. Richard, A. Dkhissi

Thin Solid Films · 2011 · 11 citations · 21 references

Concepts

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