Concepedia

Wide area polycrystalline diamond coating and stress control by sp3 hot filament CVD reactor

J. Zimmer, Gerry Chandler, T. Sharda

Thin Solid Films · 2007 · 13 citations · 7 references

DOI

Concepts

References

7

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

A.R. Krauss, Orlando Auciello, D. M. Gruen et al. · Diamond and Related Materials · 2001 · 367 citations

, , +11

Intrinsic stress in diamond films prepared by microwave plasma CVD

H. Windischmann, Glenn F. Epps, Yue Cong et al. · Journal of Applied Physics · 1991 · 262 citations

, , +17

Nanomechanical resonant structures in nanocrystalline diamond

L. Šekarić, J. M. Parpia, H. G. Craighead et al. · Applied Physics Letters · 2002 · 200 citations

, , +16

Understanding the mechanism of CVD diamond

W. F. Banholzer · Surface and Coatings Technology · 1992 · 46 citations

, , +4

Dissociation kinetics of molecular hydrogen in a microwave plasma and its influence on the hydrogen content in diamond films

T. Sharda, D.S. Misra, D.K. Avasthi et al. · Solid State Communications · 1996 · 41 citations

, , +8