Concepedia

Publication | Closed Access

Facility for simultaneous dual-beam ion implantation

DOI

26

Citations

10

References

2005

Year

J.R. Kaschny, R. Kögler, H. Tyrrof, W.J. Burger, F. Eichhorn, A. Mücklich, C. Serre, W. Skorupa
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

References

YearCitations

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