Piezoelectric property of an epitaxial lead titanate thin film deposited by the hydrothermal method

Abstract

A PbTiO3 epitaxial thin film was deposited at 150°C at a thickness of 430nm. The domain structure was composed of c domain and small amount of a domain. The DE hysteresis curve and piezoelectric strain curve were asymmetrical because the initial domain structure was stable and difficult to reverse perfectly with an external electric field. The strain has exceptional linearity, and the d33eff coefficient was found to be 97pC∕N, which is larger than the theoretical value.