Publication | Closed Access
Chemical Solution Routes to Single-Crystal Thin Films
420
Citations
49
References
1996
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringNanomaterialsNanotechnologyCrystal Growth TechnologySurface ScienceApplied PhysicsHydrothermal EpitaxyInorganic Single CrystalsEpitaxial Thin FilmsThin FilmsEpitaxial GrowthChemical Vapor DepositionThin Film ProcessingChemical Solution
Epitaxial thin films of inorganic single crystals can be grown on single-crystal substrates with a variety of different solution chemistries. This review emphasizes chemical solution deposition, in which a solution is used to deposit a layer of precursor molecules that decompose to low-density, polycrystalline films during heating. Ways to control film cracking during deposition and heat treatment and why many precursors synthesize metastable crystalline structures are discussed, and the different mechanisms that convert the polycrystalline film into a single crystal are reviewed. Hydrothermal epitaxy, in which single crystal thin films are directly synthesized on templating substrates in an aqueous solution at temperatures <150°C, is also discussed.
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