Three-axis capacitive accelerometer with uniform axial sensitivities

Abstract

A three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed using a micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can be detected by parallel shift and tilt of a seismic mass, respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by a three-dimensional sensor structure.