Concepedia

Publication | Closed Access

Diamond membranes with controlled stress for submicron lithography

DOI

17

Citations

14

References

1993

Year

Lothar Schäfer, Andrea Bluhm, C.‐P. Klages, Bernd Löchel, Leandro Buchmann, H.‐L. Huber
Diamond and Related Materials

References

YearCitations

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