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Reaction chemistry and resulting surface structure of HgCdTe etched in CH4/H2 and H2 ECR plasmas

Materials ScienceReaction ChemistryChemical EngineeringSurface StructureEngineeringSurface CharacterizationSurface AnalysisSurface ScienceH2 Ecr PlasmasHydrogenChemistryPlasma ProcessingPlasma EtchingChemical Vapor DepositionElectrochemistry