Preparation of silica/ceria nano composite abrasive and its CMP behavior on hard disk substrate

CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation

Hong Lei, Jianbin Luo · Wear · 2004 · 134 citations

Natural Sciences, Materials Engineering, Materials Science +10

Synthesis of Microporous Silica Spheres

R. Vacassy, Robert J. Flatt, Heinrich Hofmann et al. · Journal of Colloid and Interface Science · 2000 · 118 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

PERFORMANCE CHARACTERIZATION OF CERIUM OXIDE ABRASIVES FOR CHEMICAL-MECHANICAL POLISHING OF GLASS

Robert Sabia, Harrie J. Stevens · Machining Science and Technology · 2000 · 98 citations

Natural Sciences, Materials Engineering, Materials Science +16

The materials research society

Robert P. H. Chang · Advanced Materials · 1990 · 88 citations

Natural Sciences, Materials Engineering, Materials Science +4

Preparation of alumina/silica core-shell abrasives and their CMP behavior

Hong Lei, Pengzhen Zhang · Applied Surface Science · 2007 · 79 citations

Natural Sciences, Materials Engineering, Materials Science +14