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Silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition for micromechanical system applications

Materials ScienceEngineeringMicrofabricationSilicon On InsulatorSurface ScienceApplied PhysicsMechanical EngineeringChemical Vapor DepositionThin FilmsMicromechanical System ApplicationsMicroelectronicsPlasma ProcessingThin Film Processing