Silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition for micromechanical system applications

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

Natural Sciences, Chemistry, Materials Science +17

Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

Helmut Mäckel, R. Lüdemann · Journal of Applied Physics · 2002 · 247 citations

Engineering, Materials Engineering, Materials Science +17

Application of excitation cross sections to optical plasma diagnostics

John B. Boffard, Chun C. Lin, Charles A DeJosephJr · Journal of Physics D Applied Physics · 2004 · 210 citations

Natural Sciences, Physics, Optics +14

Anemometer with hot platinum thin film

F. Mailly, R. Bonnot, Pierre Temple‐Boyer et al. · Sensors and Actuators A Physical · 2001 · 204 citations

Engineering, Materials Science, Physics +11

The preparation, characterization and applications of silicon nitride thin films

C.E. MOROSANU · Thin Solid Films · 1980 · 171 citations

Natural Sciences, Materials Engineering, Materials Science +12