Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching - Concepedia

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Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching

75

Citations

6

References

2005

Year

Seh‐Won Ahn, Ki-Dong Lee, Jinsung Kim, Sang Hoon Kim, Sarng H. Lee, Joo-Do Park, Phil-Won Yoon

Microelectronic Engineering

Materials ScienceEngineeringNanoimprint LithographyElectron-beam LithographyMicrofabricationBeam LithographyFabrication TechniqueApplied PhysicsPrinted ElectronicsSubwavelength Aluminum WireNanofabrication3D PrintingReactive IonNanolithography Method

References

	Year	Citations

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