Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Reflective polarizer based on a stacked double-layer subwavelength metal grating structure fabricated using nanoimprint lithography

Zhaoning Yu, Paru Deshpande, Wei Wu et al. · Applied Physics Letters · 2000 · 142 citations

Natural Sciences, Materials Engineering, Materials Science +12

Study on polarizing visible light by subwavelength-period metal-stripe gratings

Bernd Schnabel · Optical Engineering · 1999 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +15

Fabrication of large area 100 nm pitch grating by spatial frequency doubling and nanoimprint lithography for subwavelength optical applications

Zhaoning Yu, Wei Wu, Lei Chen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +17

Lift-off process for nanoimprint lithography

Patrick Carlberg, Mariusz Graczyk, E.-L. Sarwe et al. · Microelectronic Engineering · 2003 · 49 citations

Engineering, Materials Engineering, Materials Science +14