Microelectronics Journal · 2003 · 100 citations · 11 references
EngineeringMaterials ScienceMechanical EngineeringHeat TransferMicroelectromechanical SystemsMicrofabricationMems DesignThermal DesignThermal ManagementThermal Management MaterialsThermal Properties Of MaterialsThermal SensorsHigh-temperature MemsPower ConsumptionPower Consumption ModelingResistive MicroheatersThermal CharacterizationThermal MicroactuatorsThermally Driven MicroactuatorsThermo-mechanical Design
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