Concepedia

Measuring thickness and composition of thin surface films by means of an electron probe

Benedikt Schumacher, S. S. Mitra

Microelectronics Reliability · 1962 · 13 citations · 5 references

DOI

Concepts

References

5

Penetration of Electrons in Aluminum Oxide Films

J. R. Young · Physical Review · 1956 · 146 citations

, , +12

Transmission of 0-40 kev Electrons by Thin Films with Application to Beta-Ray Spectroscopy

R.O. Lane, D. J. Zaffarano · Physical Review · 1954 · 145 citations

, , +13

New Method for Range Measurements of Low-Energy Electrons in Solids

J. E. Holliday, E. J. Sternglass · Journal of Applied Physics · 1959 · 81 citations

, , +12

Resolution of Electron Probe Microanalyzers

David B. Wittry · Journal of Applied Physics · 1958 · 55 citations

, , +10

Calculation of X-Ray Intensities from Electron Probe Specimens

L. S. Birks · Journal of Applied Physics · 1961 · 48 citations

, , +17