Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 63 citations · 0 references
Natural SciencesChemistryMaterials ScienceSemiconductor MaterialsSurface ChemistrySurface ScienceSemiconductor SurfacesSurface Chemistry Of SolidsSurface ModificationSurface PhysicsSurface SpectroscopyX-ray Photoelectron SpectroscopyStability EnhancementSurface Oxidation EffectsSurface StabilityUltraviolet Photoelectron SpectroscopyUltraviolet Surface Treatment
We report photoemission studies of GaAs(100) surfaces treated with H2S. Our high-resolution core level photoemission data show that these surfaces are completely terminated by a GaSx species and the treated surface is stable in air or water. Thus a H2S treatment might result in better device quality surfaces and interfaces than the surfaces prepared by recently proposed chemical treatments involving Na2S or (NH4)2S.