Publication | Closed Access
Monolithic fabrication of multilayer P(VDF-TrFE) cantilevers
31
Citations
16
References
2008
Year
Materials ScienceWafer Scale ProcessingEngineeringMicrofabricationMonolithic FabricationFabrication TechniqueApplied PhysicsSemiconductor Device FabricationElectronic PackagingMicroelectronics
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