Publication | Closed Access
The effects of O2/Ar ratio on the structure and properties of hafnium dioxide (HfO2) films
25
Citations
11
References
2006
Year
Materials ScienceMaterials EngineeringChemical EngineeringMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceO2/ar RatioChemistryHydrogenThin FilmsChemical Vapor DepositionThin Film ProcessingHafnium Dioxide
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