The effects of O2/Ar ratio on the structure and properties of hafnium dioxide (HfO2) films

Mechanisms responsible for chemical shifts of core-level binding energies and their relationship to chemical bonding

Paul S. Bagus, Francesc Illas, Gianfranco Pacchioni et al. · Journal of Electron Spectroscopy and Related Phenomena · 1999 · 326 citations

Natural Sciences, Chemistry, Physics +15

Amorphous stability of HfO2 based ternary and binary composition spread oxide films as alternative gate dielectrics

Ken Hasegawa, Parhat Ahmet, Noriaki Okazaki et al. · Applied Surface Science · 2003 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +16

Reactive d.c. magnetron sputtering of the oxides of Ti, Zr, and Hf

William D. Sproul, Michael E. Graham, Ming‐Show Wong et al. · Surface and Coatings Technology · 1997 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +7

Influence of annealing condition on the properties of sputtered hafnium oxide

Seok-Woo Nam, Jung-Ho Yoo, Suheun Nam et al. · Journal of Non-Crystalline Solids · 2002 · 43 citations

Natural Sciences, Materials Engineering, Materials Science +9

Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films

M. Alvisi, F. De Tomasi, M. R. Perrone et al. · Thin Solid Films · 2001 · 42 citations

Natural Sciences, Materials Science, Physics +16