Infrared absorption and reflection spectroscopic studies of SOI structures formed by oxygen or nitrogen implantation - Concepedia

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Infrared absorption and reflection spectroscopic studies of SOI structures formed by oxygen or nitrogen implantation

10

Citations

6

References

1989

Year

Yuehui Yu, Fang Ziwei, Lin Chenglu, Zou Shichang, P.L.F. Hemment

Materials Letters

Materials ScienceEngineeringReflection Spectroscopic StudiesOptical PropertiesSpectroscopySurface ScienceApplied PhysicsSoi StructuresInfrared SpectroscopyAbsorption SpectroscopySpectroscopic PropertyNitrogen Implantation

References

	Year	Citations

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