Effect of Si<sub>2</sub>N<sub>2</sub>O content on the microstructure, properties, and erosion of silicon nitride–Si<sub>2</sub>N<sub>2</sub>O <i>in situ</i> composites - Concepedia

Concepedia

Publication | Closed Access

Effect of Si<sub>2</sub>N<sub>2</sub>O content on the microstructure, properties, and erosion of silicon nitride–Si<sub>2</sub>N<sub>2</sub>O <i>in situ</i> composites

17

Citations

10

References

2002

Year

Dong Soo Park, Hyun-Ju Choi, Byung Dong Han, Hai Doo Kim, Dae Soon Lim

Journal of materials research/Pratt's guide to venture capital sources

Materials ScienceEngineeringApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicrostructure

References

	Year	Citations

Page 1