The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition

D. Crǎciun, G. Socol, N. Stefan, G. Dorcioman, M. Hanna, Curtis R. Taylor, E. S. Lambers, V. Crăciun

Applied Surface Science · 2013 · 25 citations · 25 references

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