Concepedia

Improvement in gate LWR with plasma curing of ArF photoresists

Atsushi Ando, Eriko Matsui, Nobuyuki Matsuzawa, Yohei Yamaguchi, K. Kugimiya, M. Yoshida, K. M. A. Salam, Taketoshi Kusakabe, Takahide Tatsumi

Thin Solid Films · 2006 · 10 citations · 2 references

DOI

Concepts

References

2

Infrared characteristic group frequencies

Marek Goldstein · Endeavour · 1981 · 2.6K citations

, , +8

Molecular connectivity in structure-activity analysis

Ian W. Nowell · Endeavour · 1986 · 596 citations

, , +14