Statistics
Publications
1
Citations
10
H-Index
1
Active since
2006
Affiliations
Sony (Taiwan)(Current)
Taketoshi Kusakabe is an author at Sony (Taiwan) specializing in plasma passivation, electrical engineering, and optoelectronics.
Publications per year
2006–2006
1
1
Improvement in gate LWR with plasma curing of ArF photoresists
Atsushi Ando, Eriko Matsui, Nobuyuki Matsuzawa et al. · Thin Solid Films · 2006 · 10 citations
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