Publication | Closed Access
Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application
28
Citations
4
References
2001
Year
EngineeringMicrofabricationApplied PhysicsSensor DesignPorous SiliconPorous SensorPressure Sensor ApplicationField Emitters
| Year | Citations | |
|---|---|---|
Page 1
Page 1