Measurement · 2013 · 20 citations · 11 references
EngineeringMechatronics EngineeringInstrumentationMetrologyOpticsDisplacement MeasurementDisplacement SensorsDistance MeasurementInterferometryOptical InstrumentationOptical MetrologyInterferometric Displacement MeasurementInterferometric MeasurementInterferometric MetrologyOptical Displacement MeasurementOptical Interferometry
11
Fabry–Perot metrology for displacements up to 50 mm
John Lawall · Journal of the Optical Society of America A · 2005 · 87 citations
Engineering, Physics, Metrology +16
Markus A. Schmidt, Bernd Werther, Norbert Fuerstenau et al. · Optics Express · 2001 · 47 citations · Full text
Engineering, Materials Science, Materials Characterization +16
Common-path laser interferometer
Xinghua Qu, Lihua Wang, Yunxia Fu · Optics Letters · 2009 · 28 citations
Natural Sciences, Physics, Metrology +14