A comparative study of methods for thin-film and surface analysis

Abstract

A number of features characteristic of different thin-film analytical methods are reviewed and evaluated. The principles, approach for quantification and prominent problems of the most commonly used methods (ESCA, AES, SIMS, LEIS, RBS and NRA) are discussed. Evaluation of the special advantages and disadvantages of the different methods points out the need for a synergetic multi-method approach in thin-film analysis.