Concepedia

Practical estimation of measurement noise and flatness deviation on focus variation microscopes

Claudiu Giusca, James D. Claverley, Wenjuan Sun, Richard Leach, Franz Helmli, Mathieu P.J. Chavigner

CIRP Annals · 2014 · 50 citations · 3 references

DOI

Concepts

References

3

Calibration of the scales of areal surface topography-measuring instruments: part 1. Measurement noise and residual flatness

Claudiu Giusca, Richard Leach, Franck Helary et al. · Measurement Science and Technology · 2012 · 131 citations

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Calibration of the scales of areal surface topography measuring instruments: part 2. Amplification, linearity and squareness

Claudiu Giusca, Richard Leach, Frank Helery · Measurement Science and Technology · 2012 · 102 citations

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Calibration of the scales of areal surface topography measuring instruments: part 3. Resolution

Claudiu Giusca, Richard Leach · Measurement Science and Technology · 2013 · 95 citations

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