Calibration of the scales of areal surface topography measuring instruments: part 2. Amplification, linearity and squareness

TLDR

The methods comply with draft international specification standards on areal surface texture. The paper presents methods for determining the amplification coefficient, linearity, and squareness of areal surface topography instrument axes, including z‑axis calibration per surface profile standards and x/y axis calibration using cross‑grating artefacts. These methods involve calibrating the z‑axis scale per guidelines, calibrating the x and y axes with cross‑grating artefacts without pitch measurement, and extending the z‑axis calibrated range by overlapping multiple step‑height measurements.

Abstract

Methods for determining the amplification coefficient, linearity and squareness of the axes of areal surface topography measuring instruments are presented. The methods are compliant with draft international specification standards on areal surface texture. A method of calibrating the z-axis scale according to the guidelines given in surface profile specification standards, which is applied to areal measurements, is first presented. Then a method of calibrating the scales of the x and y axes using cross grating artefacts, and which is not based on pitch measurement, is introduced. A method for extending the calibrated range of the z-axis scale, which uses multiple overlapped measurements of a step height artefact, is also discussed.