Publication | Closed Access
Depth profiling of porous silicon surface by means of heavy-ion TOF ERDA
18
Citations
6
References
1994
Year
Surface CharacterizationEngineeringPhysicsSurface AnalysisSurface ScienceApplied PhysicsHeavy-ion Tof ErdaDepth ProfilingSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingPorous Silicon Surface
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