E. Arai

Stoichiometry measurement and electric characteristics of thin-film Ta2O5 insulator for ultra-large-scale integration

Ken D. Shimizu, Masao Katayama, H. Funaki et al. · Journal of Applied Physics · 1993 · 25 citations

Engineering, Chemical Composition, Thin Film Process Technology +19

TOF ERD experiments using a 10 MeV 35Cl beam

E. Arai, H. Funaki, Masao Katayama et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 24 citations

Engineering, Nuclear Physics, Physics +5

Stoichiometry and profiling of surface layers by means of TOF-E ERDA and RBS

E. Arai, H. Funaki, Masao Katayama et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 21 citations

Materials Science, Surface Characterization, Surface Layers +9

Depth profiling of porous silicon surface by means of heavy-ion TOF ERDA

E. Arai, A. Zounek, M. Sekino et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 18 citations

Surface Characterization, Engineering, Physics +10

Anomaly in the 15N, 16O, 19F + 54,56Fe fusion cross sections around the Coulomb barrier energy

H. Funaki, E. Arai · Nuclear Physics A · 1993 · 14 citations

Engineering, Nuclear Physics, Physics +9