Nanomold Fabrication and Nanoimprint Devices Using Advanced Blu-ray Disc Technology

Abstract

We developed some Blu-ray Disc technologies to fabricate fine subwavelength structures (SWSs) such as motheye structures. In this paper, we report that SWS patterns on a mold were transferred to a poly(methyl methacrylate) (PMMA) substrate by ultraviolet (UV) nanoimprint and formed fine two-dimensional SWS by using advanced Blu-ray technologies. In the wavelength region from 350 to 800 nm, the reflection of the UV-nanoimprinted surface decreased from approximately 4 to 0.1% or less, and also these SWS films developed transmittance above 99%. Both reflectance and transmittance of the SWS substrates or films agreed well with the theoretical calculations.