Publication | Closed Access
Influence of argon dilution on growth and properties of hydrogenated nanocrystalline silicon films
34
Citations
57
References
2010
Year
Materials EngineeringMaterials ScienceEngineeringNanotechnologySurface ScienceApplied PhysicsArgon DilutionSemiconductor Device FabricationThin FilmsSilicon On InsulatorChemical Vapor DepositionThin Film Processing
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