Publication | Closed Access
Direct patterning of microelectrode arrays using femtosecond laser micromachining
33
Citations
20
References
2010
Year
EngineeringMicromachinesMicrofabricationLaser Micro-processingApplied PhysicsMicromachiningMicro-optical ComponentMicrofluidicsFemtosecond Laser MicromachiningMicroelectronics
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