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Liquid phase epitaxial growth of large area Hg1−<i>x</i>Cd<i>x</i>Te epitaxial layers

59

Citations

11

References

1984

Year

Abstract

The liquid phase epitaxial technique in a horizontal boat is used to grow large area epitaxial layers of Hg1−xCdxTe on CdTe substrates with x=1 to x=0.15. Areas as large as 25 cm2 have been grown from Te-rich melts that have excellent compositional uniformity (Δx=0.001–0.0028) and run-to-run reproducibility (Δx=0.003–0.004). Results are presented on surface morphology, compositional grading, and electrical properties. Histograms are presented showing run-to-run wavelength reproducibility and uniformity across the epilayers for both 10–15 and 20–25 cm2 areas for selected wavelengths with x≂0.3. Data are presented showing run-to-run uniformity of carrier concentration (4.5±0.66×1016 cm−3) and hole mobility (272±15 cm2/Vs) at 77 K for x≂0.3, including their dependence on wavelength.

References

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