Template-directed vapor–liquid–solid growth of silicon nanowires

Abstract

The synthesis of Si nanowires in nanoporous anodic alumina membranes was demonstrated using a combination of Au electrodeposition and vapor–liquid–solid growth at 500 °C using SiH4 as the Si source. The average diameter of the nanowires was 200±54 nm which was close to the pore size distribution of the membranes. High-resolution transmission electron microscopy revealed that the nanowires consist of a crystalline Si core, oriented in the 〈100〉 or 〈211〉 growth direction, with a thin (<3 nm) native oxide coating. In this process, Au terminates both ends of the growing wires, resulting in the formation of Au–Si–Au nanowires.