Concepedia
Microelectronic Engineering · 2004 · 18 citations · 1 references
Natural SciencesMaterials SciencePhysicsOptical MaterialsOpticsPhotonicsEtching ProcessesOptical Thin FilmsPhotonic CrystalsPhotonic MaterialsSilicon PhotonicsThin-film PatterningDevice FabricationNanofabrication Of Photonic StructuresPhotonic Crystal Devices
1
Plasma etching characteristics of chromium film and its novel etching mode
H. Nakata, K. Nishioka, Haruhiko Abe · Journal of Vacuum Science and Technology · 1980 · 42 citations
Natural Sciences, Materials Engineering, Materials Science +16