Publication | Closed Access
Synthesis of alkali-soluble silicone resin suitable for resist material in microlithography
16
Citations
5
References
1990
Year
Materials ScienceMaterials EngineeringWafer Scale ProcessingEngineeringBeam LithographyMicrofabricationMechanical EngineeringFabrication TechniqueAlkali-soluble Silicone ResinResist MaterialNanolithography Method
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