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Electrically conducting, ultra-sharp, high aspect-ratio probes for AFM fabricated by electron-beam-induced deposition of platinum

Materials ScienceElectrical EngineeringEngineeringElectron MicroscopyElectron-beam LithographyMicroscopyNanotechnologyHigh Aspect-ratio ProbesSurface ScienceApplied PhysicsScanning Probe MicroscopyMicroanalysisNanometrologyElectron-beam-induced Deposition