Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations · 5 references
EngineeringElectrical EngineeringMaterials ScienceOptoelectronicsPhotonicsSemiconductor DevicesDetector TechnologyDevice CharacterizationQuantum Well DevicesSemiconductor DetectorsX-ray DetectionX-ray DetectorsCharge DiffusionCharge Transfer EfficiencyDetector FabricationDetector Quantum EfficiencyFully Depleted DetectorsQuantum EfficiencyReadout NoiseTechnology Acceptance Evaluation
We have been developing fully-depleted CCDs fabricated on N-type silicon wafer in collaboration with HAMAMATSU Photonics K.K.We have made several wafer runs to optimize the basic characteristics of the devices such as the charge transfer efficiency (CTE), the full-well capacity and the amplifier gain, followed by the optimization of the backside treatment to improve quantum efficiency (QE) in blue wavelengths. The optimization process is successfully completed, and Hamamatsu recently started to deliver the 2k × 4k (15 μm pixel) four-side buttable devices for acceptance evaluation at the National Astronomical Observatory of Japan. Based on the measured QE in the X-ray, the depletion depth reaches 200 μm with CTE as good as >0.999995 for serial and parallel directions and with readout noise of < 5 e- for 130 kHz readout. The size of charge diffusion is estimated to be < 7.5 μm (one sigma) for pinhole image at wavelength of 450 nm. The device flatness is < 15-20 μm, and the dark current is a few e-/hour/pixel at -100°C and ~ 20 e-/hour/pixel at -80°C.
5
Subaru Prime Focus Camera — Suprime-Cam
Satoshi Miyazaki, Yutaka Komiyama, M. Sekiguchi et al. · Publications of the Astronomical Society of Japan · 2002 · 723 citations · Full text
Natural Sciences, Astronomy, Physics +13
Yukiko Kamata, Satoshi Miyazaki, Masaharu Muramatsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 15 citations