High resolution microanalysis in materials science using electron energy loss measurements

Abstract

SUMMARY The physical basis of microanalysis using measurements of electron energy losses associated with atom ionization or plasmon excitation in thin electron microscope specimens is explained in a simple manner. In addition the equipment used to resolve both the high and low energy regions of the loss electron spectrum is described. It is shown that ionization loss analysis is still in its infancy, but plasmon loss analysis has now been providing quantitative microanalytical data on light metal alloys for 8 years. The results obtained from both techniques and their application to specific metallurgical problems are reviewed. Conclusions are drawn concerning the future use of these techniques in high resolution microanalysis.